UHP Metal Gasket Face Seal Fitting (sizes up to 1 inch) – VacuSeal™

VacuSeal™ Metal Gasket Face Seal Fittings provide extremely high leak integrity, making them suitable for use in critical applications where ultra-high purity conditions are required, such as semiconductor tool hook-ups, valve manifold boxes (VMBs), and gas distribution systems. The fittings feature a mating gasket and toroid design, creating a metal-to-metal seal and affording leak-free service from vacuum up to 9000 psig.

VacuSeal™ fittings are designed to work with flat and Verfilo’s TorqTite™ self-aligning face seal gaskets, which require no tools for installation and eliminate component loosening due to thermocycling and vibration. TorqTite™ also ensures sealing, even on damaged toroids and allows for the application of extremely high torque without risk of damage to the sealing surface. This, coupled with the VacuSeal™ fittings’ ultra-high purity materials of construction, minimizes particle generation and ensures leak integrity in wafer manufacturing operations where cleanliness is of the utmost importance.

All VacuSeal™ fittings are Helium leak tested to ensure performance and reliability in demanding UHP applications.

Markets:
• Semiconductor
• Tool Fab
• Analytical Laboratory
• Pharmaceutical
• BioPharm
• Aerospace
• Industrial

Applications:
• Corrosive and specialty gases
• Semiconductor Fab Gas Distribution Systems
• Semiconductor Tools
• Tool Hook-ups
• Gas Cabinets
• Valve Manifold Boxes (VMB)

Features/Benefits:
• Two leak test ports for easy leak testing
• Leak rate: ≤1 x 10-9 STD scc/sec He
• 5 Ra internal electropolish surface finish
• Female nuts are silver-plated with an enhanced plating process for aggressive chemical processes used in cleaning, electropolishing and passivation
• Non-rotational female nut prevents transmission of torque during make-up and therefore minimizes twist of componentry, which causes stress concentration
• Anti-galling female nut ensures consistent makeup without plating or lubrication.
• Patented TorqTite™ gasket initially contacts on the inner taper, radially forcing out any entrapped contaminants
• Heat code on gland provides raw material traceability
• No axial clearance is needed to remove components from a system
• Smooth transition into the internal diameter minimizes entrapment areas

Hastelloy C-22® is a registered trademark of Haynes International, Inc.